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US 2013/0276537 A1Published application
Micromechanical sensor element and sensor device having this type of sensor element
AssigneeRobert Bosch GmbH
InventorsFrank SCHAEFER, Nicolaus Ulbrich, Harald Emmerich
Life of this patent
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Abstract
A micromechanical sensor element for detecting lateral acceleration, having at least two boundaries situated essentially orthogonally with respect to one another, and also having at least one spring element, in which the spring element is oriented at an angle relative to at least one of the boundaries.
Claims9
A micromechanical sensor element for detecting a lateral acceleration, comprising:
- at least two boundaries situated essentially orthogonally with respect to one another;
- and
- at least one spring element, wherein the spring element is oriented at an angle relative to at least one of the boundaries.
A micromechanical sensor device, comprising:
- at least two micromechanical sensor elements, each of the micromechanical sensor elements being for detecting a lateral acceleration, and including at least two boundaries situated essentially orthogonally with respect to one another, and including at least one spring element, wherein the spring element is oriented at an angle relative to at least one of the boundaries;
- and
- a micromechanical Z acceleration sensor element.
A sensor system, comprising:
- a micromechanical sensor device, including:
- at least two micromechanical sensor elements, each of the micromechanical sensor elements being for detecting a lateral acceleration, and including at least two boundaries situated essentially orthogonally with respect to one another, and including at least one spring element, wherein the spring element is oriented at an angle relative to at least one of the boundaries;
- and
- a micromechanical Z acceleration sensor element;
- a yaw rate sensor device;
- and
- a shared evaluation device for evaluating data of the sensor device and of the yaw rate sensor device.
4 more elements
Dependencies are inferred from the claim text.