Apparatus and Method for Endpoint Detection During Electronic Sample Preparation
OwnerJames Barry Colvininventor
Life of this patent
Estimating the term…
Abstract
A method for detecting an endpoint during removal of material from an electronic device includes while removing material from an electronic device-under-test (DUT) using a tip driven by a spindle, applying an input signal to the DUT via the tip and using an output signal received from one of the DUT and a mounting plate to which the DUT is attached to determine an endpoint for removal of material.
Claims20
A method for detecting an endpoint during removal of material from an electronic device, the method comprising:
- while removing material from an electronic device-under-test (DUT) using a tip driven by a spindle, providing an input signal on the tip;
- and
- using an output signal received from one of the DUT and a mounting plate to which the DUT is attached to determine an endpoint for removal of material.
A method for detecting an endpoint during removal of material from an electronic device, the method comprising:
- while removing material from an electronic device-under-test (DUT) using a tip driven by a spindle, supplying an input signal to the DUT;
- and
- using an output signal received via the tip to determine an endpoint for removal of material.
An apparatus for detecting an endpoint during removal of material from an electronic device, comprising:
- means for characterizing at least one electronic device as to an inherent relationship between a given characteristic of the at least one electronic device and a thickness of material remaining over a given target, the at least one electronic device having been produced using a given process;
- means for determining an endpoint value based on the characterized relationship and a desired amount of material to be left over the given target;
- means for removing material from an electronic device-under-test (DUT) using a tip driven by a spindle while applying an input signal to a first electrode, the DUT having been produced using the given process;
- and
- means for using an output signal received from a second electrode to terminate the removal of material when the output signal reaches the endpoint value, wherein the first electrode is one of the DUT and the tip and the second electrode is the opposite one of the DUT and the tip.
Dependencies are inferred from the claim text.