Concentration Measuring Device used in Manufacturing Process

A manufacture processing system comprising

• a main body that has a flow channel, that exclusively flows a first fluid used in a manufacturing process and a second fluid whose concentration is known and that is used in the manufacturing process in the flow channel, and that outputs a state signal showing whether or not the fluid flowing in the flow channel is the second fluid, and
• a concentration measuring device having a concentration measuring part that measures a concentration of a predetermined component in the fluid flowing in the flow channel, a state signal receiving part that receives the state signal from the main body, and a correcting part that obtains a reference measurement value as being a measurement value measured by the concentration measuring part during a period while it is judged that the second fluid flows in the flow channel by a value of the state signal and that corrects the concentration measuring part based on the reference measurement value.

A correcting method, wherein

• a first fluid used in a manufacturing process and a second fluid whose concentration is known and that is used in the manufacturing process flow exclusively in an identical flow channel, and a state signal that shows whether the fluid flowing in the flow channel is the second fluid or not is output,
• a concentration of the second fluid flowing in the flow channel is measured during a period while it is judged that the second fluid flows in the flow channel by a value of the state signal, and
• the concentration measurement is corrected based on a reference measurement value as being the measurement result.