Load cup substrate sensing
AssigneeApplied Materials, Inc.
InventorsDavid James LISCHKA, Thomas Lawrence TERRY
Life of this patent
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Abstract
Embodiments of the present invention generally provide a load cup used in the transfer of substrates in a chemical mechanical polishing system. The load cup includes an improved substrate edge sensing mechanism to ensure a substrate is present and correctly positioned in the load cup for transfer to a polishing head. In one embodiment, a lever actuated edge sensing mechanism is provided. In one embodiment, the edge of a substrate contacts a lever, which contacts a sensor to detect that the substrate is present and correctly positioned for exchange with a polishing head. Embodiments of the present invention provide reliable detection, while reducing contact with the feature side of the substrate during substrate transfer.
Claims20
A load cup assembly, comprising:
- a cup member having a pedestal member disposed therein;
- a plurality of substrate positioning members extending from the pedestal member;
- and
- a plurality of lever actuated substrate sensors disposed on the pedestal member and configured to send signals to a controller.
A load cup assembly, comprising;
- a cup member having a pedestal member disposed therein;
- a plurality of substrate positioning members extending from the pedestal member;
- a plurality of substrate sensors disposed on the pedestal member and configured to send signals to a controller;
- a plurality of lever arms disposed about the pedestal member, wherein each lever arm is disposed adjacent a corresponding substrate sensor;
- and
- a plurality of counterweights disposed about the pedestal member, wherein each counterweight is attached to a corresponding lever arm.
A method of transferring a substrate in a chemical mechanical polishing system, comprising:
- placing a substrate into a load cup assembly in a feature side down orientation, wherein the load cup assembly comprises a cup with a pedestal disposed therein, a plurality of substrate guiding members extending from the pedestal, and a plurality of lever actuated sensors disposed on the pedestal;
- and
- detecting the presence of the substrate in the load cup assembly by determining if one or more of the lever actuated sensors is actuated by the substrate.
Dependencies are inferred from the claim text.