X-ray measurement apparatus
AssigneeRigaku Corporation
InventorYoshinori UEJI
Life of this patent
Estimating the term…
Abstract
A portable, for example, a hand-held-type, X-ray measurement apparatus, wherein the vibration or hand-shaking of the X-ray measurement apparatus is detected by a vibration-detection sensor such as a distance sensor, a gyro sensor, or the like, and a measurement value for the X-ray intensity obtained using a two-dimensional X-ray detector is corrected on the basis of a variation quantity obtained using the vibration-detection sensor. The correction may be a correction related to an X-ray source, a correction related to an X-ray detector, a correction calculated using the CPU of a computer and a software program, or the like.
Claims19
An X-ray measurement apparatus having:
- an X-ray source for generating an X-ray incident on a measurement object;
- X-ray detection means for detecting an X-ray leaving the measurement object;
- and
- a housing containing the X-ray source and the X-ray detection means;
- the X-ray measurement apparatus comprising:
- a vibration quantity detection sensor for detecting the vibration quantity of the housing;
- wherein a process for correcting a measurement value obtained using the X-ray detection means is performed on the basis of the vibration quantity obtained using the vibration quantity detection sensor.
Dependencies are inferred from the claim text.