Thin film capacitor
AssigneeTDK Corporation
InventorsYoshihiko YANO, Tatsuo Namikawa, Yasunobu Oikawa
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Abstract
A thin film capacitor includes two or more of dielectric body layers that are alternately laminated on an under-electrode, and internal electrode layers that are laminated between the dielectric body layers, and are exposed off the dielectric body layer, and a connection electrode that is electrically connected to the internal electrode layers via the exposed portion of the internal electrode layers, A relationship between an average grain size D of crystal grains in the internal electrode layers and an average grain size d of crystal grains in the connection electrode is D>d.
Claims6
A thin film capacitor, comprising:
- a plurality of dielectric body layers and internal electrode layers that are alternately laminated on an under-electrode, a portion of each of the internal electrode layers being exposed from the dielectric body layer;
- and
- a connection electrode to which at least a portion of the exposed portion of each of the internal electrode layers contact;
- wherein
- a relationship between an average grain size D of crystal grains in the internal electrode layers and an average grain size d of crystal grains in the connection electrode is D>d.
Dependencies are inferred from the claim text.