Fabrication of a micro-optics device with curved surface defects
AssigneeInternational Business Machines Corporation
InventorsFei Ding, Urs T. Duerig, Armin W. Knoll, Rainer F. Mahrt, Thilo H. Stoeferle
Life of this patent
Estimating the term…
Loading patent…
AssigneeInternational Business Machines Corporation
InventorsFei Ding, Urs T. Duerig, Armin W. Knoll, Rainer F. Mahrt, Thilo H. Stoeferle
Estimating the term…
A method of fabrication of a micro-optics device included providing a layer of material; patterning the layer of material by one or more of: locally unzipping and desorbing molecules thereof, with a nano-scale dimensioned probe, to obtain a curved surface for the layer of material, the curved surface having a curved profile in a plane section; and completing a layer structure perpendicular to the plane section by providing one or more additional layers of material in contact with the curved surface to obtain the micro-optics device, wherein the micro-optics device has the layer structure, with a given layer thereof comprising a defect delimited by two surfaces, wherein one of the two surfaces is the curved surface.
A method of fabrication of a micro-optics device, the method comprising:
A micro-optics device, comprising:
Dependencies are inferred from the claim text.