Halogen gas sensor comprising cobalt
AssigneeTexas Instruments Incorporated
InventorsMICHAEL JAMES SATTERFIELD, JEFFREY R. ROUBIK
Life of this patent
Estimating the term…
Abstract
A method of halogen gas monitoring includes contacting room air to be monitored with a halogen sensor including a cobalt or cobalt alloy layer. The halogen sensor exhibits a detectable change in at least one property upon contact with a halogen gas. A measurement from the halogen sensor is obtained after the contacting. The presence of the halogen gas is monitored based on the measurement.
Claims18
A method of halogen gas monitoring, comprising:
- contacting room air to be monitored with a halogen sensor comprising a cobalt or cobalt alloy layer, wherein said halogen sensor exhibits a detectable change in at least one property upon contact with at least one halogen gas;
- obtaining a measurement from said halogen sensor after said contacting, and
- monitoring for a presence of said halogen comprising species based on said measurement.
A system for halogen gas monitoring, comprising:
- a halogen sensor comprising a cobalt or cobalt alloy layer on a substrate, wherein said halogen sensor exhibits a detectable change in at least one property upon contact with at least one halogen gas, and
- a measurement system, comprising:
- a source for applying an energetic stimulus to said halogen sensor, and
- a detector for obtaining a measurement responsive to said energetic stimulus.
The system of claim 11, wherein said substrate has a dielectric layer thereon and said cobalt or cobalt alloy layer is on said dielectric layer.
Dependencies are inferred from the claim text.