Microscope spectrometer, optical axis shift correction device, spectroscope and microscope using same

A spectroscope comprising:

• a light source that illuminates a sample;
• a variable bandpass filter that selects a desired wavelength region of reflected light from the sample;
• a two-dimensional array detector onto which light that has passed through the variable bandpass filter is incident;
• and
• a controller that shifts the wavelength region of the variable bandpass filter, calculates the difference in the detected output at each element of the two-dimensional detector before and after the shift, and makes a spectral output.

A microscope comprising:

• a light source that illuminates a sample;
• a variable bandpass filter that selects a desired wavelength region of reflected light from the sample;
• a two-dimensional array detector onto which light that has passed through the variable bandpass filter is incident;
• an image-forming optical system that forms an image of the light passing through the variable bandpass filter onto a light-receiving surface of the two-dimensional array detector;
• and
• a controller that shifts the wavelength region of the bandpass filter, calculates the difference in the detected output at each element of the two-dimensional array detector before and after the shift, and makes the difference a spectral output.