Magnet Array Configuration for Higher Efficiency Planar Motor

A stage apparatus comprising:

• a first surface;
• a second surface;
• an overall magnet array, the overall magnet array being mounted on the first surface, the overall magnet array including an X magnet array and a Y magnet array, the X magnet array including at least one X magnet, the Y magnet array including at least one Y magnet;
• and
• a plurality of coils, the plurality of coils being mounted on the second surface, the plurality of coils including at least one first coil arranged to cooperate with the X magnet array to control force on the first surface along an x-axis, the plurality of coils further including at least one second coil arranged to cooperate with the Y magnet array to control force on the first surface along a y-axis, wherein forces applied to the first surface relative to a z-axis are applied through cooperation between the at least one first coil and the overall magnet array, and wherein the at least one second coil is not activated to cooperate with the overall magnet array when the forces applied to the first surface relative to the z-axis are applied through the cooperation between the at least one first coil and the overall magnet array.

A stage apparatus comprising:

• a first surface;
• a second surface;
• an overall magnet array, the overall magnet array being mounted on the first surface, the overall magnet array including an X magnet array and a Y magnet array, the X magnet array including at least one X magnet, the Y magnet array including at least one Y magnet;
• and
• a plurality of coils, the plurality of coils being mounted on the second surface, the plurality of coils including at least one X coil and at least one Y coil, the at least one X coil being arranged to cooperate with the X magnet array to cause the first surface to accelerate along an x-axis, the at least one Y coil being arranged to cooperate with the Y magnet array to cause the first surface to accelerate along a y-axis, to levitate with respect to a z-axis, to provide pitch compensation, to provide yaw compensation, and to provide roll compensation, wherein the at least one X coil substantially does not cooperate with the X magnet array to cause the first surface to accelerate along the y-axis, to levitate with respect to the z-axis, to provide yaw compensation, to provide the pitch compensation, nor to provide roll compensation.

A stage apparatus comprising:

• a first member;
• a second member;
• and
• a moving device that moves the first member relative to the second member, the moving device including a first part and a second part;
• wherein the first part includes a first magnet array, the first magnet array being mounted on the first member, the first magnet array including an X magnet array, the X magnet array including at least one X magnet;
• and a first plurality of coils, the first plurality of coils being mounted on the second member, the first plurality of coils including at least a first coil arranged to cooperate with the X magnet array to control force on the first surface along an x-axis, and
• wherein the second part includes a second magnet array, the second magnet array being mounted on the first member, the second magnet array including a Y magnet array, the Y magnet array including at least one Y magnet;
• and a second plurality of coils, the second plurality of coils being mounted on the second member, the second plurality of coils including at least a second coil arranged to cooperate with the Y magnet array to control force on the first member along a y-axis, wherein the at least second coil is further arranged to cooperate with the second magnet array to control force applied to the first member along a z-axis, about an x-axis, about a y-axis, and about a z-axis.