Resonator element, resonator, electronic device, electronic apparatus, and mobile object
AssigneeSeiko Epson Corporation
InventorOsamu ISHII
Life of this patent
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Abstract
A resonator element includes a substrate including a first principal surface and a second principal surface respectively forming an obverse surface and a reverse surface of the substrate, and vibrating in a thickness-shear vibration mode, a first excitation electrode disposed on the first principal surface, and a second excitation electrode disposed on the second principal surface, and being larger than the first excitation electrode in a plan view, the first excitation electrode is disposed so as to fit into an outer edge of the second excitation electrode in the plan view, and the energy trap confficient M fulfills 15.5≦M≦36.7.
Claims13
A resonator element comprising:
- a substrate including a first principal surface and a second principal surface respectively forming an obverse surface and a reverse surface of the substrate, and vibrating in a thickness-shear vibration mode;
- a first excitation electrode disposed on the first principal surface;
- and
- a second excitation electrode disposed on the second principal surface, and being larger than the first excitation electrode in a plan view,
- wherein the first excitation electrode fits into an outer edge of the second excitation electrode in the plan view, and
- the following relational expressions are fulfilled:
- M=K×(hx/2×ts)×√Δ
- Δ=(fs−fe)/fs
- fs=R/[ts+te2×(ρe/ρx)]
- fe=R/[ts+te×(ρe/ρx)]
- 15.5≦M≦36.7
- where:
- M denotes an energy trap confficient;
- K denotes an anisotropy factor of the substrate;
- hx denotes a length of the first excitation electrode along a thickness-shear vibration direction;
- ts denotes a thickness of the substrate;
- Δ denotes an amount of frequency drop;
- fs denotes a cut-off frequency of the substrate;
- fe denotes a frequency when the excitation electrodes are disposed on the substrate;
- R denotes a frequency constant of the substrate;
- te denotes a sum of a thickness of the first excitation electrode and a thickness of the second excitation electrode;
- te2 denotes the thickness of the second excitation electrode;
- ρe denotes a density of the excitation electrodes;
- and
- ρx denotes a density of the substrate.
Dependencies are inferred from the claim text.