Compact, configurable power supply for energizing ozone-producing cells
AssigneeMKS Instruments, Inc.
InventorsKen Tran, Feng Tian, Xing Chen, Franklin Lee
Life of this patent
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AssigneeMKS Instruments, Inc.
InventorsKen Tran, Feng Tian, Xing Chen, Franklin Lee
Estimating the term…
Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.
A method for supplying power to at least one ozone-producing cell, comprising:
A power converter for energizing at least one ozone-producing cell comprising:
A method for supplying power to at least one ozone-producing cell, comprising:
A power converter for powering at least one ozone-producing cell, comprising:
A method for supplying power to at least one ozone-producing cell, comprising:
Dependencies are inferred from the claim text.