Plate, Transducer and Methods for Making and Operating a Transducer
AssigneeInfineon Technologies AG
InventorAlfons Dehe
Life of this patent
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Abstract
A plate, a transducer, a method for making a transducer, and a method for operating a transducer are disclosed. An embodiment comprises a plate comprising a first material layer comprising a first stress, a second material layer arranged beneath the first material layer, the second material layer comprising a second stress, an opening arranged in the first material layer and the second material layer, and an extension extending into opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved away from a top surface of the plate based on a difference in the first stress and the second stress.
Claims24
A transducer device comprising:
- a membrane;
- and
- a backplate spaced apart from the membrane, the backplate comprising:
- a first material layer comprising a first stress;
- a second material layer arranged adjacent the first material layer, the second material layer comprising a second stress;
- an opening extending through the first material layer and the second material layer;
- and
- an extension shaping the opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved towards the membrane.
A transducer comprising:
- a membrane;
- and
- a backplate spaced apart from the membrane, the backplate comprising an opening, the opening comprising a convex portion, wherein the convex portion is curved towards the membrane.
A transducer comprising:
- a movable electrode;
- and
- a fixed electrode spaced from the movable electrode, the fixed electrode comprises an opening extending there through, the opening defined by a main portion of the fixed electrode and an extension portion of the fixed electrode, the extension portion being bent towards the movable electrode.
Dependencies are inferred from the claim text.