Ion Beam Bending Magnet for a Ribbon-Shaped Ion Beam
AssigneeNissin Ion Equipment Co., Ltd.
InventorsHilton Frank Glavish, Shojiro Dohi, Benjamin Thomas King
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AssigneeNissin Ion Equipment Co., Ltd.
InventorsHilton Frank Glavish, Shojiro Dohi, Benjamin Thomas King
Estimating the term…
An ion beam bending magnet provides a curved path through the magnet for bending a ribbon-shaped ion beam having its major cross-sectional dimension normal to the bending plane of the magnet. The magnet comprises a ferromagnetic yoke surrounding the beam path and having an internal profile in cross-section formed of four angled sides. These sides are angled to the major dimension of the ribbon beam passing through the magnet, so that the internal profile of the yoke is relatively wide in the center of the ribbon beam and relatively narrow near the top and bottom edges of the ribbon beam. Electrical conductors against the internal surfaces of the yoke provide a uniform distribution of electrical current per unit length along the angled sides of the profile, providing a substantially uniform magnetic bending field within the magnet yoke.
An ion beam bending magnet having an ion beam inlet, an ion beam outlet and a curved path through the magnet for an ion beam, said curved path having a path length between said beam inlet and said beam outlet, said curved path bending monotonically in an ion beam bending plane and having a curved central beam axis, said magnet being adapted to accommodate and bend along said curved beam path, a ribbon-shaped ion beam having a cross-sectional profile with a major dimension normal to said bending plane;
Dependencies are inferred from the claim text.