Terahertz radiation detection using micro-plasma
AssigneeTeraOptronics B.V.
InventorsAfric Simone Meijer, Willem Joan Van Der Zande
Life of this patent
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Abstract
Detector for terahertz radiation with a micro-plasma cell (1) having a cavity (5) including a plasma in operation when applying a DC bias to the micro-plasma cell (1). Furthermore, the detector is provided with read-out electronics (20) connected to the micro-plasma cell (1). The read-out electronics measure changes of an electron density in the plasma in the micro-plasma cell (1) with respect to the DC bias provided electron density. The cavity (5) includes a gas composition near atmospheric pressure or higher, and the gas composition includes a Penning mixture.
Claims21
1-20. (canceled)
A detector for terahertz radiation comprising a micro-plasma cell with a cavity comprising a plasma in operation when applying a bias to the micro-plasma cell, and read-out electronics connected to the micro-plasma cell measuring changes of an electron density in the plasma in the micro-plasma cell with respect to the bias provided electron density,
- wherein the cavity comprises a gas composition near atmospheric pressure or higher, and the gas composition comprises a Penning mixture.
A method of detecting terahertz radiation, comprising
- generating a plasma in a sensor cavity using a bias, the plasma having a bias provided electron density,
- detecting changes in the electron density in the plasma with respect to the bias provided electron density by measuring a current change,
- wherein the cavity comprises a gas composition near atmospheric pressure or higher, and the gas composition comprises a Penning mixture.
An image sensor comprising an array having a plurality of detectors, each detector comprising a micro-plasma cell with a cavity comprising a plasma in operation when applying a bias to the micro-plasma cell, and read-out electronics connected to the micro-plasma cell measuring changes of an electron density in the plasma in the micro-plasma cell with respect to the bias provided electron density,
- wherein the cavity comprises a gas composition near atmospheric pressure or higher, and the gas composition comprises a Penning mixture.
The image sensor of claim 16, wherein the array has a pixel size of between 1 and 500 μm.
Dependencies are inferred from the claim text.