Probe and object information acquisition apparatus using the same
AssigneeCanon Kabushiki Kaisha
InventorsEiji Takeuchi, Koichiro Nakanishi
Life of this patent
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Abstract
A probe is provided that can suppress the warp of an optical reflection member on a receiving surface and stably receive photoacoustic waves. The probe includes: an element having at least one cell in which a vibration film containing one electrode out of two electrodes that are provided so as to interpose a space therebetween is supported in a manner allowed to vibrate owing to the acoustic wave; an optical reflection layer 108 that is provided closer to the object than the element is; a support layer 104 supporting the optical reflection layer 108; and a warp suppressing layer 106 that is provided on at least one of the both surfaces of the support layer 104.
Claims20
A probe receiving an acoustic wave from an object, comprising:
- an element having at least one cell in which a vibration film containing one electrode out of two electrodes that are provided so as to interpose a space therebetween is vibratably owing to the acoustic wave,;
- an optical reflection layer that is provided closer to the object than the element is;
- a support layer that is provided closer to the element than the optical reflection layer is, and supports the optical reflection layer;
- and
- a warp suppressing layer to suppress the warp of the support layer, that is provided on at least one of a surface of the support layer closer to the optical reflection layer and a surface of the support layer closer to the element.
A probe receiving an acoustic wave from an object, comprising:
- an element having at least one cell in which a vibration film containing one electrode out of two electrodes that are provided so as to interpose a space therebetween is supported in a manner owing to the acoustic wave;
- an optical reflection layer that is provided closer to the object than the element is;
- a support layer that is provided closer to the element than the optical reflection layer is, and supports the optical reflection layer;
- and
- a layer that is provided on at least one of a surface of the support layer closer to the optical reflection layer and a surface of the support layer closer to the element and has a higher Young's modulus than the support layer has.
Dependencies are inferred from the claim text.