# US 2013/0252518 A1 · Polishing head zone boundary smoothing > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0252518 A1 - Document ID: US20130252518A1 - Status: Published application - Kind: A1 - Application number: 13/893,030 - Filed: 2013-05-13 - Published: 2013-09-26 - Earliest claimed: 2009-05-14 - Assignees: Applied Materials, Inc. - Inventors: Hung Chih CHEN; Samuel Chu-Chiang HSU; Gautam Shashank DANDAVATE; Dennis M. KOOSAU - Web page: https://patentgrep.com/patent/US20130252518A1 ## CPC - B24B 37/30: for single side lapping of plane surfaces - B24B 41/06: Work supports, e.g. adjustable steadies (B24B37/27 takes precedence) - B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS ## Abstract A method and apparatus for chemical mechanical polishing of substrates, and more particularly a method and apparatus related to a carrier had for use in chemical mechanical polishing is provided. in one embodiment the carrier head assembly comprises a base assembly for providing support to the substrate, a flexible membrane mounted on the base assembly haying a generally circular central portion with a lower surface that provides a substrate mounting surface, and a plurality of independently pressurizable chambers formed between the base assembly and the flexible membrane, comprising an annular outer chamber and a non-circular inner chamber, is provided. ## Claims ### Claim 1 A carrier head assembly capable of rotation about a centerline for chemical mechanical polishing of a substrate, comprising: a base assembly configured to provide support for the substrate; and a flexible membrane mounted on the base assembly having a generally circular central portion with a lower surface that provides a substrate mounting surface, wherein an annular outer chamber and a non-concentric inner chamber are formed between the base assembly and the flexible membrane, the non-concentric inner chamber is non-concentric relative to the centerline, and the annular chamber and the non-concentric inner chamber are independently pressurizable. ### Claim 2 (depends on 1) The carrier head assembly of claim 1, wherein the non-concentric inner chamber is defined by an annular flap secured to the base assembly to form the independently pressurizable chambers. ### Claim 3 (depends on 2) The carrier head assembly of claim 2, wherein the flexible membrane further comprises an annular perimeter portion that extends away from the lower surface for connection to the base assembly, wherein the annular flap extends from an inner surface of the of the central portion. ### Claim 4 (depends on 3) The carrier head assembly of claim 3, wherein the annular flap is secured to the base assembly to divide the volume between the flexible membrane and the base assembly into the independently pressurizable non-concentric inner chamber and the annular outer chamber. ### Claim 5 (depends on 4) The carrier head assembly of claim 4, wherein each of the non-concentric inner chamber and the annular outer chamber are individually pressurizable to the same or different pressures. ### Claim 6 (depends on 4) The carrier head assembly of claim 4, wherein the annular flap is secured to the base assembly by an annular clamp ring. ### Claim 7 (depends on 6) The carrier head assembly of claim 6, wherein the annular perimeter portion of the flexible membrane is secured to the base assembly by the annular clamp ring. ### Claim 8 (depends on 7) The carrier head assembly of claim 7, wherein the annular perimeter portion is damped between a retaining ring and the base assembly. ### Claim 9 (depends on 2) The carrier head assembly of claim 2, further comprising a load transferring material positioned within the carrier head assembly for transferring a load to the substrate. ### Claim 10 (depends on 9) The carrier head assembly of claim 9, wherein the load transferring material is positioned in between the annular clamping ring and the flexible membrane. ### Claim 11 (depends on 1) The carrier head assembly of claim 1, wherein the non-concentric inner chamber is defined by a flap selected from the group consisting of: a star-shaped flap, a triangular flap, a circular flap, and an oval flap, secured to the base assembly to form the independently pressurizable chambers. ### Claim 12 (depends on 11) The carrier head assembly of claim 11, wherein the flexible membrane further comprises an annular perimeter portion that extends away from the lower surface for connection to the base assembly, wherein the flap extends from an inner surface of the of the central portion. ### Claim 13 (depends on 12) The carrier head assembly of claim 12, wherein the flap is secured to the base assembly to divide the volume between the flexible membrane and the base assembly into the independently pressurizable non-concentric inner chamber and the annular outer chamber. ### Claim 14 (depends on 13) The carrier head assembly of claim 13, wherein each of the non-concentric inner chamber and the annular outer chamber are individually pressurizable to the same or different pressures. ### Claim 15 (depends on 14) The carrier head assembly of claim 14, wherein the flap is secured to the base assembly by an annular clamp ring. ### Claim 16 (depends on 15) The carrier head assembly of claim 15, wherein the annular perimeter portion of the flexible membrane is secured to the base assembly by the annular clamp ring. ### Claim 17 (depends on 16) The carrier head assembly of claim 16, wherein the annular perimeter portion is clamped between a retaining ring and the base assembly. ### Claim 18 (depends on 17) The carrier head assembly of claim 17, further comprising a load transferring material positioned within the carrier head assembly for transferring a load to the substrate. ### Claim 19 (depends on 18) The carrier head assembly of claim 18, wherein the load transferring material is positioned in between the annular clamping ring and the flexible membrane.