# US 2013/0240705 A1 · Vibration suppression apparatus and vibration suppression method

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2013/0240705 A1
- Document ID: US20130240705A1
- Status: Published application
- Kind: A1
- Application number: 13/777,016
- Filed: 2013-02-26
- Published: 2013-09-19
- Earliest claimed: 2012-03-14
- Assignees: Canon Kabushiki Kaisha
- Applicants: Canon Kabushiki Kaisha
- Inventors: Tosiya ASANO
- Web page: https://patentgrep.com/patent/US20130240705A1

## CPC

- F16F 15/04: using elastic means (single elements or their attachment F16F1/00 - F16F13/00); {(F16F15/023, F16F15/03 take precedence)}
- F16F 15/002: {characterised by the control method or circuitry (control of mechanical oscillations per se G05D19/00)}
- F16F 15/027: comprising control arrangements {(F16F15/0237 takes precedence)}
- F16F: SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION

## Abstract

The present invention provides a vibration suppression apparatus which includes a first object elastically supported on a base, a second object elastically supported on the first object, and a driving unit configured to drive the first object, and which suppresses a vibration of the second object, comprising a first generation unit configured to generate a first signal, a second generation unit configured to generate a second signal, and a control unit configured to control the driving unit, wherein the control unit controls the driving unit based on the first signal, and after the deviation between the relative distance between the base and the first object, and the first reference distance falls within an allowable range, the control unit controls the driving unit based on the first signal and the second signal.

## Claims

### Claim 1

A vibration suppression apparatus which includes a first object elastically supported on a base, a second object elastically supported on the first object, and a driving unit configured to be interposed between the base and the first object and drive the first object, and which suppresses a vibration of the second object, comprising:
a first generation unit configured to generate a first signal which instructs a driving amount of the driving unit to reduce a deviation between a relative distance between the base and the first object, and a first reference distance;
a second generation unit configured to generate a second signal which instructs a driving amount of the driving unit to reduce a deviation between a relative distance between the first object and the second object, and a second reference distance; and
a control unit configured to control the first generation unit, the second generation unit, and the driving unit,
wherein the control unit operates the first generation unit and controls the driving unit based on the first signal, and
after the deviation between the relative distance between the base and the first object, and the first reference distance falls within an allowable range, the control unit operates the second generation unit and controls the driving unit based on the first signal and the second signal.

### Claim 2 (depends on 1)

The apparatus according to claim 1, wherein when controlling the driving unit based on the first signal and the second signal, the control unit controls the driving unit based on a signal obtained by combining the first signal and the second signal.

### Claim 3 (depends on 1)

The apparatus according to claim 1, wherein after the deviation between the relative distance between the first object and the second object, and the second reference distance falls within an allowable range, the control unit controls the first generation unit to remove an alternative current component from the first signal, and controls the driving unit based on a signal obtained by removing the alternative current component from the first signal, and the second signal.

### Claim 4 (depends on 3)

The apparatus according to claim 3, further comprising:
a third object elastically supported on the base;
a second driving unit configured to be interposed between the base and the third object, and drive the third object; and
a second control unit configured to control the second driving unit,
wherein after the deviation between the relative distance between the first object and the second object, and the second reference distance falls within the allowable range, the second control unit controls the second driving unit to reduce a deviation between a relative distance between the second object and the third object, and a third reference distance.

### Claim 5

A vibration suppression method in a vibration suppression apparatus which includes a first object elastically supported on a base, a second object elastically supported on the first object, a driving unit configured to be interposed between the base and the first object and drive the first object, a first generation unit configured to generate a first signal that instructs a driving amount of the driving unit to reduce a deviation between a relative distance between the base and the first object, and a first reference distance, and a second generation unit configured to generate a second signal that instructs a driving amount of the driving unit to reduce a deviation between a relative distance between the first object and the second object, and a second reference distance, and which suppresses a vibration of the second object, comprising:
operating the first generation unit to control the driving unit based on the first signal; and
after the deviation between the relative distance between the base and the first object, and the first reference distance falls within an allowable range, operating the second generation unit to control the driving unit based on the first signal and the second signal.