# US 2013/0239885 A1 · Film formation mask

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- Number: US 2013/0239885 A1
- Document ID: US20130239885A1
- Status: Published application
- Kind: A1
- Application number: 13/889,552
- Filed: 2013-05-08
- Published: 2013-09-19
- Earliest claimed: 2010-08-17
- Assignees: Canon Kabushiki Kaisha
- Applicants: Canon Kabushiki Kaisha
- Inventors: Tetsuya KARAKI
- Web page: https://patentgrep.com/patent/US20130239885A1

## CPC

- C23C 16/042: {using masks}
- C23C 14/042: {using masks}
- H05B 33/10: Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
- H10K 71/166: {using selective deposition, e.g. using a mask}
- H10K 59/35: comprising red-green-blue [RGB] subpixels
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

Provided is a film formation mask capable of preventing slit-like openings from being closed by vibrations so as to form a highly precise patterned film with stability. In a film formation mask formed by providing multiple slit-like openings in a metal foil, the shape of the opening of at least one end of the slit-like openings is asymmetrical with respect to a center line of the width direction of the slit-like openings.

## Claims

### Claim 1

A film formation mask, comprising a metal foil fixed to a frame body with stronger tension applied to the metal foil in one direction than in another direction, wherein:
the metal foil includes slit-like openings elongated in the one direction, which are repeatedly provided in a short side direction of the slit-like openings; and
a shape of at least one end of each of the slit-like openings is asymmetrical with respect to a center line of a short side of the slit-like openings.

### Claim 2 (depends on 1)

The film formation mask according to claim 1, wherein shapes of both ends of the slit-like openings are asymmetrical with respect to the center line of the short side of the slit-like openings and symmetrical with respect to a center line of a long side of the slit-like openings.

### Claim 3

(canceled)