# US 2013/0239883 A1 · Arrangement for the production of structured substrates > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0239883 A1 - Document ID: US20130239883A1 - Status: Published application - Kind: A1 - Application number: 13/888,499 - Filed: 2013-05-07 - Published: 2013-09-19 - Earliest claimed: 2010-11-07 - Assignees: Centofex Lda & Comandita - Applicants: Centofex Lda & Comandita - Inventors: Hans BOHNET; Klaus-Peter THIEL - Web page: https://patentgrep.com/patent/US20130239883A1 ## CPC - H10P 14/00: Formation of materials, e.g. in the shape of layers or pillars - B05C 11/08: Spreading liquid or other fluent material by manipulating the work, e.g. tilting - B05C 11/1039: {Recovery of excess liquid or other fluent material; Controlling means therefor} - B05C 13/02: for particular articles - G03F 7/162: {Coating on a rotating support, e.g. using a whirler or a spinner} - G03F 7/3021: {from a wafer supported on a rotating chuck} - G03F 7/3092: {Recovery of material; Waste processing} - H10P 72/0414: {using mainly spraying means, e.g. nozzles} - H10P 72/0424: {using mainly spraying means, e.g. nozzles} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract An arrangement for producing structured substrates is provided, which includes a device for applying layer systems including a device for applying liquid materials to rotating substrates, a housing, a rotating holder for the substrate to be coated, a feeder for liquid materials to be applied, and a collection device having multiple removal contraptions for liquid materials that do not remain on the substrate. The housing of the device is filled with an inert gas, in particular dried, molecular nitrogen, noble gas, or a mixture thereof. The additional receptacles and conduits of the arrangement for producing structured substrates are gas-tight and are designed such that an inert molecular nitrogen or noble gas atmosphere is created above the liquid contents thereof. The collection device has various collection zones in which different liquid materials can be selectively collected and selectively removed via the associated removal contraption. ## Claims ### Claim 1 An arrangement for producing structured substrates with a device for applying layer systems to a substrate, the arrangement comprising: a closed chamber for applying liquid materials to form the layer system; a rotating holder for substrates; and a collecting device surrounding the rotating holder and arranged in the closed chamber, the collecting device adapted to collect liquid materials spun off of the substrate, wherein the collecting device has at least two removal devices configured to remove the liquid collected materials selectively individually or in batches, wherein the collecting device in the chamber surrounds the holder in a ring-shaped manner and has at least two collection zones separated from one another by separating elements to collect the spun-off liquid materials, and wherein the collecting device has at least two wall-shaped separating elements on a side facing the holder, which form at least two ring-shaped channels as collection zones, which are provided with one or more removal devices. ### Claim 2 (depends on 1) The arrangement for producing structured substrates according to claim 1, wherein the collecting device on the side facing the holder has a plurality of wall-shaped separating elements, which form a plurality of ring-shaped channels, wedge-shaped in cross section, as collection zones, the chamber being provided with one or more removal devices. ### Claim 3 (depends on 1) The arrangement for producing structured substrates according to claim 1, wherein the collecting device is formed movable relative to the holder so that depending on the movement the different collection zones for collecting spun-off liquid materials become operational. ### Claim 4 (depends on 2) The arrangement for producing structured substrates according to claim 2, wherein the collecting device with the plurality of ring-shaped channels, which are wedge-shaped in cross section and form the collection zones, is configured to be movable. ### Claim 5 (depends on 1) The arrangement for producing structured substrates according to claim 1, wherein a plurality of ring-shaped channels are formed solely by wall-shaped separating elements and a common wall of the collecting device. ### Claim 6 (depends on 5) The arrangement for producing structured substrates according to claim 5, wherein the common wall has a form of a hollow cylinder or a hollow cone. ### Claim 7 (depends on 1) The arrangement for producing structured substrates according to claim 1, wherein the wall-shaped separating elements are substantially parallel to one another. ### Claim 8 (depends on 1) The arrangement for producing structured substrates according to claim 1, wherein the chamber for applying liquid materials is surrounded gas-tight by a housing, particularly made of V4A steel or glass. ### Claim 9 (depends on 1) The arrangement for producing structured substrates according to claim 1, wherein the chamber for applying liquid materials is filled with an inert gas, particularly a dehumidified inert gas. ### Claim 10 (depends on 1) The arrangement for producing structured substrates according to claim 1, wherein a removal device is provided, separate from the chamber for applying liquid materials, which conveys the liquid materials collected in the collecting device via the removal devices selectively into separate storage containers, and wherein the storage containers are suitable for storing especially degassed and/or dehumidified liquid materials, particularly photopolymer solutions. ### Claim 11 (depends on 10) The arrangement for producing structured substrates according to claim 10, wherein the storage container is made of V4A steel or glass and connected via a gas-tight transport line to the collecting device and the removal device. ### Claim 12 (depends on 1) The arrangement for producing structured substrates according to claim 1, wherein at least one supply line for the liquid materials to the chamber for applying liquid materials is provided and the at least one supply line and/or the removal device is provided with storage containers with at least one degassing device and with at least one dehumidifying device. ### Claim 13 (depends on 12) The arrangement for producing structured substrates according to claim 12, wherein the degassing device has a supply line for inert gas, particularly for molecular nitrogen, and/or a noble gas, particularly helium, neon, or argon, and a sieve disposed in a bottom area of the storage container through whose openings inert gas, particularly as dried gas, flows for degassing and for dehumidifying of the liquid materials, particularly of photopolymer solutions. ### Claim 14 (depends on 13) The arrangement for producing structured substrates according to claim 13, wherein the supply line is provided with a molecular sieve or manganese dioxide or limonite filters for dehumidifying the inert gas flowing therethrough. ### Claim 15 (depends on 1) The arrangement for producing structured substrates according to claim 1, wherein a filter for particle filtration is provided downstream of the collecting device. ### Claim 16 (depends on 10) The arrangement for producing structured substrates according to claim 10, wherein a vacuum distillation device is provided, which separates the liquid materials in the different storage containers by distillation into its components, particularly into water, solvents, and liquid materials, particularly the photopolymer solutions, and transfers the separated components into gas-tight reservoirs, whereby these are provided particularly with an inert gas atmosphere.