# US 2013/0239692 A1 · Microelectronic Device Testing Apparatus and Method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0239692 A1 - Document ID: US20130239692A1 - Status: Published application - Kind: A1 - Application number: 13/423,466 - Filed: 2012-03-19 - Published: 2013-09-19 - Earliest claimed: 2012-03-19 - Assignees: Analog Devices, Inc. - Inventors: Wei Chen; Huy Khanh Tang - Web page: https://patentgrep.com/patent/US20130239692A1 ## CPC - G01P 21/00: Testing or calibrating of apparatus or devices covered by the preceding groups - G01C 25/005: {initial alignment, calibration or starting-up of inertial devices} - G01M 7/045: {in a circular direction} - G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G}) - G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S) - G01M: TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR ## Abstract A microelectronic device tester has a mounting member (for mounting a device), a drive shaft connected to the mounting member, and a vibration shaft mechanically in communication with the drive shaft. The drive shaft and vibration shaft are non-coaxial, and the drive shaft has a drive shaft proximal end and a drive shaft distal end. The drive shaft proximal end is connected to the mounting member, and the drive shaft distal end terminates proximal of the entire vibration shaft. ## Claims ### Claim 1 A microelectronic device tester comprising: a mounting member for mounting a device; a drive shaft connected to the mounting member; and a vibration shaft mechanically in communication with the drive shaft, the drive shaft and vibration shaft being non-coaxial, the drive shaft having a drive shaft proximal end and a drive shaft distal end, the drive shaft proximal end connected to the mounting member, the drive shaft distal end terminating proximal of the entire vibration shaft. ### Claim 2 (depends on 1) The microelectronic device tester as defined by claim 1 further comprising a drive member having a proximal side coupled with the distal end of the drive shaft, the drive member also having a distal side coupled with the proximal end of the vibration shaft. ### Claim 3 (depends on 1) The microelectronic device tester as defined by claim 1 wherein the drive shaft distal end is connected directly to and integral with the vibration shaft. ### Claim 4 (depends on 1) The microelectronic device tester as defined by claim 1 further comprising a mass coupled with the vibration shaft, the mass being configured to move linearly, linear motion of the shaft causing the mounting member to rotate. ### Claim 5 (depends on 4) The microelectronic device tester as defined by claim 4 further comprising an actuator in communication with the mass, the actuator being configured to generate a force to the mass to cause the mass to move linearly. ### Claim 6 (depends on 1) The microelectronic device tester as defined by claim 1 wherein the mounting member has a substantial center, the drive shaft being secured to the substantial center of the mounting member. ### Claim 7 (depends on 1) The microelectronic device tester as defined by claim 1 wherein the drive shaft forms a drive shaft projection on the mounting member, the vibration shaft forming a vibration shaft projection on the mounting member, at least a portion of the vibration shaft projection intersecting the drive shaft projection. ### Claim 8 (depends on 1) The microelectronic device tester as defined by claim 1 further comprising a MEMS gyroscope secured to the mounting member. ### Claim 9 (depends on 1) The microelectronic device tester as defined by claim 1 further comprising a reference rotational detector coupled with the mounting member. ### Claim 10 A microelectronic device tester comprising: a mounting member for mounting a device; a drive shaft connected to the mounting member; and a vibration shaft mechanically in communication with the drive shaft, the drive shaft and vibration shaft being non-coaxial, the drive shaft forming a drive shaft projection on the mounting member, the vibration shaft forming a vibration shaft projection on the mounting member, at least a portion of the vibration shaft projection intersecting the drive shaft projection. ### Claim 11 (depends on 10) The microelectronic device tester as defined by claim 10 further comprising a drive member having a proximal side coupled with one end of the drive shaft, the drive member also having a distal side coupled with one end of the vibration shaft, the drive member spacing the drive shaft from the vibration shaft. ### Claim 12 (depends on 10) The microelectronic device tester as defined by claim 10 wherein the drive shaft is connected directly to and integral with the vibration shaft. ### Claim 13 (depends on 10) The microelectronic device tester as defined by claim 10 wherein the mounting member has a substantial center, the drive shaft being secured to the substantial center of the mounting member. ### Claim 14 (depends on 10) The microelectronic device tester as defined by claim 10 further comprising means for engaging the vibration shaft to cause the mounting member to rotate in a sinusoidal manner. ### Claim 15 A method of testing a microelectronic device, the method comprising: providing a tester comprising: a mounting member for mounting a device; a drive shaft connected to the mounting member; and a vibration shaft mechanically in communication with the drive shaft, the drive shaft and vibration shaft being non-coaxial, the drive shaft forming a drive shaft projection on the mounting member, the vibration shaft forming a vibration shaft projection on the mounting member, at least a portion of the vibration shaft projection intersecting the drive shaft projection; mounting a microelectronic device to the mounting member; and rotating the mounting member to generate a test signal from the microelectronic device. ### Claim 16 (depends on 15) The method as defined by claim 15 wherein the tester has a reference device mounted to the mounting member, the reference device producing a reference signal when rotated, the method further comprising: comparing the test signal with the reference signal. ### Claim 17 (depends on 16) The method as defined by claim 16 wherein rotating comprises rotating the mounting member back and forth in a periodic manner. ### Claim 18 (depends on 16) The method as defined by claim 16 wherein the microelectronic device comprises a MEMS gyroscope. ### Claim 19 (depends on 16) The method as defined by claim 16 wherein rotating comprises rotating at a rate of up to about 40,000 degrees per second over a plurality of rotating frequencies. ### Claim 20 (depends on 16) The method as defined by claim 16 wherein the tester further comprises a mass connected with the vibration shaft, the method further comprising: causing the mass to move linearly in a direction that is generally orthogonal to the drive shaft.