# US 2013/0239679 A1 · Three-axis gyroscope

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- Number: US 2013/0239679 A1
- Document ID: US20130239679A1
- Status: Published application
- Kind: A1
- Application number: 13/418,999
- Filed: 2012-03-13
- Published: 2013-09-19
- Earliest claimed: 2012-03-13
- Inventors: Pavel Kornilovich
- Web page: https://patentgrep.com/patent/US20130239679A1

## CPC

- G01C 19/5712: the devices involving a micromechanical structure
- G01C 19/5733: Structural details or topology
- G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S)

## Abstract

Apparatus related to measuring angular velocities in three-space are provided. Drive masses distributed in a plane are force-oscillated in two orthogonal directions such that gyration of the collective is performed. Sense masses coupled by flexures to the drive masses are each displaceable along a respective single degree of freedom in response to angular velocities about a vector orthogonal to that degree of freedom. Electronic circuitry measures the respective sense mass displacements and provides corresponding signaling. The drive masses and sense masses can be formed such that a microelectromechanical system (MEMS) device is defined.

## Claims

### Claim 1

An apparatus, comprising:
a plurality of drive masses disposed in a plane, the drive masses configured to be simultaneously oscillated in two orthogonal directions in the plane; and
a plurality of sense masses, each sense mass configured to be displaced within a respective single-axis range in response to angular velocity of the apparatus about a vector orthogonal to the respective single-axis range, each drive mass supporting one or more of the sense masses.

### Claim 2 (depends on 1)

The apparatus according to claim 1 further comprising electronic circuitry configured to detect displacements of the respective sense masses.

### Claim 3 (depends on 2)

The apparatus according to claim 2, the electronic circuitry further configured to provide electronic signaling corresponding to angular velocities of the apparatus about three mutually-orthogonal axes.

### Claim 4 (depends on 1)

The apparatus according to claim 1, the sense masses and the drive masses being respective aspects of a microelectromechanical system (MEMS) device.

### Claim 5 (depends on 1)

The apparatus according to claim 1, the drive masses supported within a frame, the frame fixedly joined to the substrate, the frame and the drive masses and the sense masses formed from a single silicon wafer by way of photolithography.

### Claim 6 (depends on 1)

The apparatus according to claim 1 further comprising a plurality of accelerometers respectively disposed proximate to the drive masses.

### Claim 7 (depends on 1)

The apparatus according to claim 1, the drive masses being mechanically coupled to each other by way of respective extensions.

### Claim 8 (depends on 1)

The apparatus according to claim 1, the drive masses and the sense masses formed from a monolithic material.

### Claim 9 (depends on 1)

The apparatus according to claim 1, each sense mass being supported by either flexure coupling or torsional coupling to the corresponding drive mass.

### Claim 10 (depends on 1)

The apparatus according to claim 1, the drive masses configured such that the simultaneous oscillation in the two orthogonal directions results in three-hundred sixty degree gyration within the plane.

### Claim 11

A microelectromechanical system (MEMS) device, comprising:
a substrate;
a plurality of drive masses supported in overlying relationship to the substrate and distributed in a plane, the drive masses configured to be gyrated as an entity by way of forced oscillations in two orthogonal axes in the plane; and
a plurality of pairs of sense masses, each pair supported by a respective one of the drive masses, each sense mass displaceable in a single degree of freedom in response to angular velocity of the MEMS device about a vector orthogonal to the respective degree of freedom.

### Claim 12 (depends on 11)

The MEMS device according to claim 11, each pair including:
a sense mass configured to be displaceable in a single degree of freedom within the plane; and
a sense mass configured to be displaceable in a single degree of freedom orthogonal to the plane.

### Claim 13 (depends on 11)

The MEMS device according to claim 11, the sense masses collectively defining three mutually-orthogonal degrees of freedom so as respond to angular velocities of the MEMS device about three mutually-orthogonal vectors.

### Claim 14 (depends on 11)

The MEMS device according to claim 11 further comprising electronic circuitry configured to sense respective displacements of the sense masses, the electronic circuitry further configured to provide electronic signaling in accordance with the sensing.

### Claim 15 (depends on 11)

The MEMS device according to claim 11 further comprising a plurality of accelerometers respectively supported on the substrate.

### Claim 16 (depends on 11)

The MEMS device according to claim 11 further comprising a frame fixed to the substrate, the drive masses suspended within the frame, the frame and the drive masses and the sense masses formed from a monolithic material.