Coating compositions
AssigneeAZ Electronic Materials USA Corp.
InventorsFrancis HOULIHAN, Lin ZHANG, Alberto DIOSES, Meng LI
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Abstract
Developable bottom antireflective coating compositions are provided.
Claims20
A positive bottom photoimageable antireflective coating composition which is capable of being developed with an aqueous alkali developer and which is coated below a positive photoresist, wherein the antireflective coating composition comprises a polymer, a vinyl ether terminated crosslinking agent and one or more compounds having the formula
- W-(L-(G))p
- where W is PAG or Q, where PAG is a photoacid generator and Q is a quencher;
- where G is G1, where G1 is OH, where each L is a direct bond or a linking group;
- p is 1 to 12.
A positive bottom photoimageable antireflective coating composition which is capable of being developed with an aqueous alkali developer and which is coated below a positive photoresist, wherein the antireflective coating composition consists of a polymer, a mixture of at least one compound of formula
- (5)
- (HO-L)p1-PAG-(-L-OCH═CH2)p2 (5)
- and solvent,
- where PAG is a photoacid generator;
- each L is a direct bond or a linking group, where L is a linking group chosen from the group consisting of substituted alkyl groups, unsubstituted alkyl groups, substituted alkyl group, substituted cycloalkyl groups, unsubstituted cycloalkyl groups, substituted aryl groups, unsubstituted aryl groups, substituted heteroaryl groups, unsubstituted heteroaryl groups, substituted alkyl groups containing an ether group, unsubstituted alkyl groups containing an ether group, unsubstituted heteroaryl groups, substituted alkyl groupscontaining an ester group, and unsubstituted alkyl groups containing an ester group;
- p is an integer 1 to 12;
- p1 and p2 are each greater than or equal to 1 and p1+p2 equal 2 to 12, wherein at least one PAG contains a chromophore moiety.
Dependencies are inferred from the claim text.