Methods of forming molybdenum sputtering targets

A method of making a planar sputtering target comprising:

• forming a billet having a diameter Do, the formation comprising pressing molybdenum powder in a mold and sintering the pressed powder;
• working the billet to form a worked billet having a diameter D2 smaller than Do;
• heat treating the worked billet;
• working the worked billet to form a final billet having a diameter Df larger than D2;
• and
• heat treating the final billet.