Halogen-containing gas supply apparatus and halogen-containing gas supply method
AssigneeCentral Glass Company, Limited
InventorsAkifumi Yao, Tomonori Umezaki, Keita Nakahara, Yuta Takeda
Life of this patent
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Abstract
Disclosed is a halogen-containing gas supply apparatus for supplying a halogen-containing gas from a container filled with the halogen-containing gas at a high pressure to an external apparatus, the halogen-containing gas supply apparatus including: a supply tube connecting the container and the external apparatus; a supply valve attached to the supply tube to supply the halogen-containing gas from the container; and a shock wave prevention mechanism installed downstream of the supply valve to prevent generation of a shock wave.
Claims14
A halogen-containing gas supply apparatus for supplying a halogen-containing gas from a container filled with the halogen-containing gas at a high pressure to an external apparatus, the halogen-containing gas supply apparatus comprising:
- a supply tube connecting the container and the external apparatus;
- a supply valve attached to the supply tube to supply the halogen-containing gas from the container;
- and
- a shock wave prevention mechanism installed downstream of the supply valve to prevent generation of a shock wave.
A halogen-containing gas supply method of supplying a halogen-containing gas from a container filled with the halogen-containing gas at a high pressure to an external apparatus, the method comprising opening a supply valve to direct the high pressure halogen-containing gas in the container to the external apparatus via a shock wave prevention mechanism for preventing generation of a shock wave.
Dependencies are inferred from the claim text.