Cleaning method of immersion liquid, immersion liquid cleaning composition, and substrate

An immersion liquid cleaning composition comprising:

• a first polymer;
• a compound component;
• and
• a solvent,
• wherein the compound component consists of at least one compound selected from the set consisting of a first compound having at least two groups represented by a following formula (1), a second compound having a group represented by a following formula (2) and a third compound having a group represented by a following formula (3),
• wherein, in the formula (1), R1 represents a hydrogen atom or a methyl group, and n is an integer of 0 to 10,
• wherein, in the formula (2), each of R2 and R3 each independently represents a hydrogen atom or a group represented by a following formula (ii), and at least either one of R2 and R3 represents a group represented by the following formula (ii),
• wherein, in the formula (ii),
• each of R4 and R5 each independently represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or an alkoxyalkyl group having 1 to 6 carbon atoms, and, optionally, R4 and R5 bind with each other to form a ring structure together with the carbon atom to which R4 and R5 each bind, and
• R6 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms,
• wherein, in the formula (3), each of R7 and R8 independently represents a single bond, a methylene group, an alkylene group having 2 to 20 carbon atoms or a bivalent cyclic hydrocarbon group having 3 to 20 carbon atoms, R9 represents an alkyl group having 1 to 20 carbon atoms or a monovalent cyclic hydrocarbon group having 3 to 20 carbon atoms, and m is 0 or 1.