Process machine, in particular for treating and/or inspecting substrates
AssigneeEkra Automatisierungssysteme GmbH
InventorsJakob Szekeresch, Klaus Oppelt, Gerd Krause
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Abstract
A process machine and a related method for treating and/or inspecting printed circuit boards, solar cells or the like, has at least one transport device for transporting the substrates and at least one process device for processing the substrates. The transport device and process device are both separate, self-supporting, modular units. The modular units can be selectively combined with one another in such a way that the transport device undertakes the transportation of the substrates through the process device.
Claims18
1-17. (canceled)
A process machine for treating and/or inspecting printed circuit boards, solar cells or the like, the process machine comprising:
- at least one transport device for transporting the substrates and at least one process device for processing the substrates, the transport device and process device in each is a separate, self-supporting, modular unit, wherein the modular units are selectively combinable with one another in such a way that the transport device undertakes the transportation of the substrates through the process device.
A method for inspecting and/or treating printed circuit boards, solar cells or the like, having at least one transport device for transporting the substrates and having at least one process device for processing, in particular for treating and/or inspecting the substrates, the transport device and the process device combined in the form of separate, in each case self-supporting, modular units, in such a way that the transport device undertakes the transportation of the substrates through the process device.
Dependencies are inferred from the claim text.