Method of Fabricating Bubble-Type Micro-Pump
AssigneeBenQ Materials Corporation
InventorChen Peng
Life of this patent
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Abstract
A manufacturing method of a bubble-type micro-pump is provided. At least a bubble-generating unit is provided on the bubble-generating section. Because of the varied surface energies on the top of the bubble-generating section, the varied backfilling velocities of the fluid of the front end and the rear end cause fluid moving when a bubble vanishes. The top surface of the bubble-generating section is subjected to a particular surface treatment to form a surface energy gradient. Examples of surface treatment include sputtering a thin film with varied densities or thickness, radiating one or multi-layer thin films by a laser beam, etc.
Claims15
A method of fabricating a bubble-type micro-pump, comprising:
- providing a micro-channel having a top surface, a bottom surface and two side walls, the micro-channel comprising at least a bubble-generating section;
- providing a bubble-generating unit in the bubble-generating section of the micro-channel, for generating a bubble in a liquid between a front end and a rear end of the bubble-generating section;
- and
- applying a surface treatment to the top surface of the bubble-generating section to form a surface energy gradient on the top surface, so that a difference between a backfilling velocity at the front end and that at the rear end drives the liquid to flow toward the front end or the rear end;
- wherein the surface energy gradient is formed by using a laser beam.
Dependencies are inferred from the claim text.