Screen-printing stencil having amorphous carbon films and manufacturing method therefor
AssigneeTaiyo Chemical Industry Co., Ltd.
InventorKunihiko Shibusawa
Life of this patent
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Abstract
[Object] To provide a screen printing stencil including an amorphous carbon film, such as a DLC film, and a water-oil-repellent layer provided on at least part of the amorphous carbon film so as to exhibit high fixability. [Solution] A screen printing plate 10 of an embodiment of the present invention includes a mesh 16 fixed to a frame body 12; an emulsion layer 14 which fills up the mesh 16 and has a print pattern opening 18; an amorphous carbon film formed on at least part of the surface of an inner wall 22 of the print pattern opening 18 and composed of at least one element of silicon, oxygen, and nitrogen; and a thin film 20 of a fluorine-containing silane coupling agent formed on at least part of the amorphous carbon film.
Claims25
A screen printing plate comprising:
- a mesh fixed to a frame body;
- an emulsion layer that fills up the mesh and has a through-hole;
- an amorphous carbon film formed on at least part of the inner wall of the through-hole and composed of at least one element of silicon, oxygen, and nitrogen;
- and
- a thin film of a fluorine-containing silane coupling agent formed on at least part of the amorphous carbon film.
A screen printing mask comprising:
- a mask substrate directly attached to a frame body or indirectly attached through a mesh, the mask substrate having a through-hole;
- an amorphous carbon film formed on at least part of the inner wall of the through-hole and composed of at least one element of silicon, oxygen, and nitrogen;
- and
- a thin film of a fluorine-containing silane coupling agent formed on at least part of the amorphous carbon film.
A screen printing mask comprising:
- a mesh fixed to a frame body;
- a mask substrate attached to one surface of the mesh and having a through-hole;
- an amorphous carbon film formed on at least part of the inner wall of the through-hole and composed of at least one element of silicon, oxygen, and nitrogen;
- and
- a thin film of a fluorine-containing silane coupling agent formed on at least part of the amorphous carbon film.
A method for manufacturing a screen printing plate, the method comprising:
- fixing a mesh to a frame body;
- filling up the mesh with an emulsion to form an emulsion layer;
- forming a through-hole in the emulsion layer at a position corresponding to a print pattern;
- forming an amorphous carbon film on at least part of the inner wall of the thorough-hole, the amorphous carbon film being composed of at least one element of silicon, oxygen, and nitrogen;
- and
- forming a thin film of a fluorine-containing silane coupling agent on at least part of the amorphous carbon film.
A method for manufacturing a screen printing mask, the method comprising:
- directly fixing a mask substrate to a frame body or indirectly fixing the mask substrate through a mesh;
- forming a through-hole in a metallic plate at a position corresponding to a print pattern;
- forming an amorphous carbon film on at least part of the inner wall of the thorough-hole, the amorphous carbon film being composed of at least one element of silicon, oxygen, and nitrogen;
- and
- forming a thin film of a fluorine-containing silane coupling agent on at least part of the amorphous carbon film.
A method for manufacturing a screen printing mask, the method comprising:
- fixing a mesh to a frame body;
- attaching a mask substrate to one surface of the mesh, the mask substrate having a through-hole;
- forming an amorphous carbon film on at least part of the inner wall of the thorough-hole, the amorphous carbon film being composed of at least one element of silicon, oxygen, and nitrogen;
- and
- forming a thin film of a fluorine-containing silane coupling agent on at least part of the amorphous carbon film.
Dependencies are inferred from the claim text.