Combined environmental parameter sensor
AssigneeFreescale Semiconductor, Inc.
InventorsDubravka Bilic, Andrew D. McNeil
Life of this patent
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Abstract
A combination sensor and corresponding method of measuring a plurality of environmental parameters uses a pressure sensor disposed on an integrated circuit die; a humidity sensor disposed on the integrated circuit die; and a circuit coupled to and shared by the pressure sensor and the humidity sensor to facilitate pressure and humidity sensing
Claims21
A combination sensor comprising:
- a pressure sensor disposed on an die, the die including a semiconductor material;
- a humidity sensor disposed on the die;
- and
- a circuitry disposed on the die and coupled to and shared by the pressure sensor and the humidity sensor to facilitate pressure and humidity sensing.
A method of measuring a plurality of environmental parameters, the method comprising:
- obtaining a first value corresponding to pressure from a pressure sensor disposed on a die;
- obtaining a second value corresponding to humidity from a humidity sensor disposed on the die;
- providing a pressure parameter using at least one of the first value and the second value;
- and
- providing a humidity parameter using at least one of the first value and the second value.
The method of claim 21 wherein the one or more piezo resistive transducers comprises a plurality of piezo resistive transducers arranged in a first Wheatstone bridge configuration and the another one or more piezo resistive transducers comprises a plurality of piezo resistive transducers arranged in a second Wheatstone bridge configuration and wherein one or more bond pads are used to couple one or more common bias voltages to the first and second Wheatstone bridge.
Dependencies are inferred from the claim text.