Cryopump, method of regenerating cryopump, and control device for cryopump
AssigneeSumitomo Heavy Industries, Ltd.
InventorTsutomu Fukuda
Life of this patent
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Abstract
A cryopump includes: a first panel to be cooled by a first stage of a refrigerator; a second panel to be cooled by a second stage of the refrigerator; a panel temperature sensor provided with the first panel and/or the second panel; a stage temperature sensor provided with the first stage and/or the second stage; and a control unit that controls vacuum pumping based on the temperature measured by the stage temperature sensor. The control unit controls regeneration including a heating process of a cryopanel, and uses the temperature measured by the panel temperature sensor exclusively in the regeneration. The control unit completes the heating process based on the temperature measured by the panel temperature sensor.
Claims9
A cryopump comprising:
- a refrigerator comprising a first stage and a second stage to be cooled to a temperature lower than that of the first stage;
- a cryopanel comprising a first panel to be cooled by the first stage and a second panel to be cooled by the second stage;
- a panel temperature sensor provided with at least one of the first panel and the second panel;
- a stage temperature sensor provided with at least one of the first stage and the second stage;
- and
- a control unit configured to control vacuum pumping based on a temperature measured by the stage temperature sensor and regeneration including a heating process of the cryopanel, and to exclusively use a temperature measured by the panel temperature sensor in the regeneration,
- wherein the control unit completes the heating process based on the temperature measured by the panel temperature sensor.
A method of regenerating a cryopump, comprising:
- controlling vacuum pumping based on a temperature measured by a stage temperature sensor;
- and
- controlling regeneration including a heating process of a cryopanel,
- wherein the heating process comprises completing the heating process based on a temperature measured by a panel temperature sensor, and the temperature measured by the panel temperature sensor is exclusively used for the regeneration.
A control device for a cryopump, wherein
- the control device is shared by a plurality of cryopump models including a first model and a second model having different bores from each other,
- the first model is a cryopump having a small bore and configured to heat a first panel late, and the second model is a cryopump having a large bore and configured to heat a second panel late, and
- a setting of a place to measure a temperature for determining completion of a heating process is configured to be selectable between the first panel and the second panel.
A control device for a cryopump, wherein
- the device is configured to select, for each model of the cryopump, a temperature sensor used for determining completion of a heating process.
Dependencies are inferred from the claim text.