Automated, three dimensional mappable environmental sampling system and methods of use
AssigneeInternational Business Machines Corporation
InventorsJennifer L. DIMITRI, Wilfredo FERRE, William T. PETRY, Ernest L. TIMLIN, JR., Marc P. YVON
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Abstract
An automated, 3D mappable environmental sampling system and methods of use is disclosed herein. The method includes routing one or more sensors throughout a facility. The method further includes collecting environmental data on a continuous basis from the one or more sensors at various locations throughout the facility. The method further includes determining whether discrepancies exist between the collected environmental data and acceptable levels of environmental data.
Claims20
A method comprising:
- routing one or more sensors throughout a facility;
- collecting environmental data on a continuous basis from the one or more sensors at various locations throughout the facility;
- and
- determining whether discrepancies exist between the collected environmental data and acceptable levels of environmental data.
A system implemented in hardware, comprising:
- a computer infrastructure operable to:
- receive environmental data from one or more sensors that are moving throughout a facility;
- compare the environmental data to at least one acceptable environmental data level;
- and
- determine whether the environmental data exceeds the at least one acceptable environmental data level.
A system comprising:
- a computer infrastructure;
- and
- one or more sensors attached to a mobile device which is structured to move in x, y, and z dimensions within a facility, wherein
- the one or more sensors are configured to collect environmental data at various locations in the x, y, and z dimensions within the facility;
- the one or more sensors provide the environmental data at the various locations to the computer infrastructure;
- the one or more sensors provide a time stamp with the environmental data to the computer infrastructure;
- and
- the computer infrastructure is structured to correlate the location and time stamp information with a location of one or more wafer lots being processed throughout the facility.
Dependencies are inferred from the claim text.