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US 2013/0211779 A1Published application
Method for determining the position of a rotation axis
AssigneeEV Group E. Thallner GmbH
InventorThomas Wagenleitner
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AssigneeEV Group E. Thallner GmbH
InventorThomas Wagenleitner
Estimating the term…
In a system having a substrate holding means for holding a substrate, wherein the substrate holding means is rotatable about an axis of rotation that is perpendicular to an X-Y coordinate system, a method for determining position of the axis of rotation in the X-Y coordinate system, comprising the steps of: providing a reference labeling on the substrate holding means or on the substrate; determining a first X-Y reference position RP of a reference labeling on the substrate holding means or on the substrate by means of optical positional detecting means that is fixed relative to the X-Y coordinate system, rotating the substrate holding means by a defined angle of rotation R around the axis of rotation, determining by means of said fixed optical positional detecting means a second X-Y reference position RP′ of the reference labeling that is changed by the rotation, and calculating the X-Y position of the axis of rotation in the substrate.
Method for determining an X-Y position, in an X-Y coordinate system, of an axis of rotation (12), which is perpendicular to the X-Y coordinate system, of a substrate holding means (14) that can rotate around the axis of rotation (12) for holding a substrate (3) with the following steps:
Method for determining a position of an axis of rotation (12) of the substrate (3) that is perpendicular to a substrate plane of a substrate (3) with the following steps:
Method for determining a position of an axis of rotation (12) of the substrate holding means (14) that is perpendicular to a substrate holding plane of a substrate holding means (14) for holding a substrate (3) with the following steps:
Method according to one of the preceding claims, wherein the determination of the first reference position RP and the second reference position RP′ by optical positional detecting means, comprising in particular at least one lens (8, 15), is preferably carried out with an optical axis (11) that is parallel to the axis of rotation (12).
Method according to one of the preceding claims, wherein the substrate holding means (14) can be moved relative to the optical positional detecting means in the X-Y coordinate system or parallel to the X-Y coordinate system, whereby the relative movement can be detected in the X- and Y-directions in the X-Y coordinate system.
Method for determining an orientation error of a large number of contact points (4, 5), oriented to one another and arranged on two opposite sides of a substrate (3), with the following course of the method:
Dependencies are inferred from the claim text.