System control apparatus and system control method

A system control apparatus that controls an operation of an instrument, the instrument consuming energy in order to adjust a state of a production system based on status data, the status data being output from a sensor measuring the status data indicating a state that affects production quality of a product produced by the production system, the system control apparatus comprising:

• a receiver that continuously receives the status data;
• a deriver that continuously derives a stability index of the status data based on the plurality of pieces of time-series status data;
• a predictor that derives a prediction range, where the status data is predicted to change, based on the status data and the stability index;
• and
• a controller that controls the operation of the instrument based on the prediction range derived by the predictor such that the status data falls within a reference range.

A system control method for controlling an operation of an instrument, the instrument consuming energy in order to adjust a state of a production system based on status data, the status data being output from a sensor measuring the status data indicating a state that affects production quality of a product produced by the production system, the system control method comprising:

• continuously receiving the status data;
• continuously deriving a stability index of the status data based on a plurality of pieces of time-series status data;
• deriving a prediction range, wherein the status data is predicted to change, based on the status data and the index;
• and
• controlling the operation of the instrument based on the prediction range derived in the prediction step such that the status data falls within a reference range.

A system control apparatus that controls an operation of a filter fan, the filter fan consuming energy in order to adjust an air cleanliness class of a clean room based on the air cleanliness class, the air cleanliness class indicating a state that affects production quality of a product produced in the clean room, the system control apparatus comprising:

• a particle sensor that acquires the air cleanliness class;
• a deriver that continuously derives a movement standard deviation of the air cleanliness class based on a plurality of time-series air cleanliness classes;
• a predictor that derives a prediction range, where the air cleanliness class is predicted to change, based on a movement average value and the movement standard deviation of the plurality of air cleanliness classes;
• and
• a controller that controls the operation of the filter fan based on the prediction range derived by the predictor such that the air cleanliness class falls within a reference range.

A system control apparatus that controls an operation of a heater, the heater consuming energy in order to adjust a state in a furnace based on a temperature, the temperature indicating a state that affects production quality of a product produced in the furnace, the system control apparatus comprising:

• a temperature sensor that acquires the temperature;
• a deriver that continuously derives a movement standard deviation of the temperature based on the plurality of time-series temperatures;
• a predictor that derives a prediction range, where the temperature is predicted to change, based on a movement average value and the movement standard deviation of the temperatures;
• and
• a controller that controls the operation of the heater based on the prediction range derived by the predictor such that the temperature falls within a reference range.