Post-fabrication self-aligned initialization of integrated devices
AssigneeInternational Business Machines Corporation
InventorsMichele M. Franceschini, John P. Karidis
Life of this patent
Estimating the term…
Abstract
Defining an active region of a phase change memory (PCM) cell including depositing a first layer of material having a first chemical composition. A second layer of material having a second chemical composition is deposited on top of the first layer of material. An electrical current pulse is applied to locally heat a region of the first layer of material and the second layer of material to cause at least one of an inter-diffusion and a liquid mixing of the first layer of material and the second layer of material. This results in in the PCM cell containing a self-aligned region that includes a phase change material that is a mixture of the first chemical composition and the second chemical composition.
Claims13
A method of defining an active region of a phase change memory (PCM) cell comprising:
- depositing a first layer of material having a first chemical composition;
- depositing a second layer of material having a second chemical composition on top of the first layer of material, and
- applying an electrical current pulse to locally heat a region of the first layer of material and the second layer of material to cause at least one of an inter-diffusion and a liquid mixing of the first layer of material and the second layer of material, resulting in the PCM cell comprising a self-aligned region comprising a phase change material that is a mixture of the first chemical composition and the second chemical composition.
A phase change memory (PCM) cell comprising:
- a first electrode contacting a first layer of material having a first chemical composition;
- a second layer of material having a second chemical composition;
- and
- a second electrode contacting the first layer of material or the second layer of material;
- the PCM cell configured for receiving at least one electrical current pulse flowing from the first electrode to the second electrode to locally heat a region of the first layer and the second layer to cause at least one of inter-diffusion and liquid mixing of the first layer of material and the second layer of material, resulting in a self-aligned region of phase change material having a chemical composition that is a mixture of the first chemical composition and the second chemical composition.
A design structure tangibly embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit, the design structure having a substantially planar surface, the design structure comprising:
- a phase change memory (PCM) cell comprising:
- a first electrode contacting a first layer of material having a first chemical composition;
- a second layer of material having a second chemical composition;
- and
- a second electrode contacting the first layer of material or the second layer of material;
- the PCM cell configured for receiving at least one electrical current pulse flowing from the first electrode to the second electrode to locally heat a region of the first layer and the second layer to cause at least one of inter-diffusion and liquid mixing of the first layer of material and the second layer of material, resulting in a self-aligned region of phase change material having a chemical composition that is a mixture of the first chemical composition and the second chemical composition.
Dependencies are inferred from the claim text.