Self-Isolated Conductive Bridge Memory Device
AssigneeImec
InventorLudovic Goux
Life of this patent
Estimating the term…
Abstract
A conductive-bridge random access memory device is disclosed comprising a second metal layer configured to provide second metal cations; a layer of insulator adjacent to the second metal layer; the layer of insulator comprising a layer of first insulator and a layer of second insulator; the layer of second insulator being adjacent to the second metal layer; a first metal layer adjacent to the layer of first insulator, the first metal layer being opposite to the second metal layer; wherein the density of the layer of second insulator is higher than the density of the layer of first insulator.
Claims10
A conductive-bridge random access memory device comprising:
- a second metal layer configured to provide second metal cations;
- a layer of insulator adjacent to the second metal layer, the layer of insulator comprising a layer of first insulator and a layer of second insulator, the layer of second insulator being adjacent to the second metal layer;
- and
- a first metal layer adjacent to the layer of first insulator, the first metal layer being opposite to the second metal layer, wherein a density of the layer of second insulator is higher than a density of the layer of first insulator.
A method of manufacturing a CBRAM memory cell comprising:
- forming a first metal layer;
- forming a layer of first insulator on the first metal layer;
- forming a layer of second insulator on the layer of first insulator;
- and
- forming a second metal on the layer of second insulator.
Dependencies are inferred from the claim text.