Zinc oxide sintered compact tablet and manufacturing method thereof

Abstract

Provided is a zinc oxide sintered compact tablet enabling a transparent conductive film having no pinholes defects to be stably obtained during vacuum deposition film formation by suppressing the occurrence of the splashing phenomenon. A zinc oxide sintered compact tablet having hexagonal crystal structure, wherein when the integrated intensity of surface (103) and surface (110) found through X-ray diffraction analysis using CuKα radiation is taken to be I(103) and I(110) respectively, the orientation of the uniaxially pressed surface that is expressed by I(103)/(I(103)+I(110)) is 0.48 or more is obtained by performing pressurized formation of a granulated powder composed of a zinc oxide powder or a powder mixture of zinc oxide and an added element as a dopant and having a percentage of donut shaped secondary particles of 50% or more, sintering at normal pressure and a temperature of 800° C. to 1300° C., and further performing reduction treatment by maintaining the normal pressure sintered compact in a vacuum at a pressure of 1×10−3 Pa or more and at a temperature of 800° C. to 1300° C. for no less than 1 minute and no longer than 10 minutes.

Dependencies are inferred from the claim text.