Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus
AssigneeDelmic B.V.
InventorsPieter Kruit, Jacob Pieter Hoogenboom, Aernout Christiaan Zonnevylle
Life of this patent
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Abstract
An inspection apparatus is provided comprising in combination at least an optical microscope (2, 3, 4) and an ion- or electron microscope (7, 8) equipped with a source (7) for emitting a primary beam (9) of radiation to a sample (10) in a sample holder. The apparatus may comprise a detector (8) for detection of secondary radiation (11) backscattered from the sample and induced by the primary beam. The optical microscope is equipped with an light collecting device (2) to receive in use luminescence light (12) emitted by the sample and to focus it on a photon-detector (4).
Claims38
Inspection apparatus (1) comprising in combination at least an optical microscope (2, 3, 4) and an ion- or electron microscope (7, 8) equipped with a source (7) for emitting a primary beam (9) of radiation to a sample (10) in a sample holder, and wherein the optical microscope (2, 3, 4) is equipped with a light collecting device (2) to receive in use luminescence light (12) emitted by the sample (10) and to focus it on a photon-detector (4).
Method of operating an inspection apparatus (1) comprising in combination at least an optical microscope (2, 3, 4) and an ion- or electron microscope (7, 8), comprising the steps of:
- emitting, and preferably directing, a primary beam (9) of radiation to a sample (10) in a sample holder;
- and,
- receiving the luminescence light (12) emitted by the sample (10).
Dependencies are inferred from the claim text.