Method for Manufacturing Glass Stamper and Method for Manufacturing Magnetic Recording Medium
AssigneeKabushiki Kaisha Toshiba
InventorsYoshiyuki KAMATA, Akira KIKITSU
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Abstract
A method for manufacturing a glass stamper includes the following steps. First, a diamond film is formed on a substrate. A resist is applied onto the diamond film and a pattern is formed by performing electron beam lithography and development. The diamond film is etched with any one of oxygen and Ar gas using the pattern on the resist as a mask, thereby transferring the pattern to the diamond film. The resist and the substrate are removed to fabricate a diamond mold. Then, a glass stamper is manufactured by glass molding using the diamond mold.
Claims4
A method for manufacturing a glass stamper, comprising the steps of:
- forming a diamond film on a substrate;
- applying a resist onto the diamond film to form a pattern by performing electron beam lithography and development;
- etching the diamond film using any one of oxygen and Ar gas with the pattern on the resist as a mask to transfer the pattern to the diamond film;
- removing the resist and the substrate to fabricate a diamond mold;
- and
- manufacturing a glass stamper by glass molding using the diamond mold.
A method for manufacturing a magnetic recording medium, comprising the steps of:
- forming a carbon protection film and a metal film on a magnetic recording layer;
- applying a UV-curable resist onto the metal film;
- performing UV imprinting using a glass stamper on the UV-curable resist to transfer a pattern to the UV-curable resist, the glass stamper being manufactured by a method for manufacturing a glass stamper, the method including the steps of:
- forming a diamond film on a substrate;
- applying a resist onto the diamond film to form a pattern by performing electron beam lithography and development;
- etching the diamond film using any one of oxygen and Ar gas with the pattern on the resist as a mask to transfer the pattern to the diamond film;
- removing the resist and the substrate to fabricate a diamond mold;
- and
- manufacturing a glass stamper by glass molding using the diamond mold;
- etching the metal film and the carbon protection film using the pattern on the UV-curable resist as a mask to expose the magnetic recording layer;
- and
- forming a concave portion in the magnetic recording layer by etching the magnetic recording layer while deactivating a magnetism of the exposed magnetic recording layer using He—N2 gas.
Dependencies are inferred from the claim text.