# US 2013/0199891 A1 · Dynamic load lock with cellular structure for discrete substrates > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0199891 A1 - Document ID: US20130199891A1 - Status: Published application - Kind: A1 - Application number: 13/748,271 - Filed: 2013-01-23 - Published: 2013-08-08 - Earliest claimed: 2012-02-08 - Assignees: Applied Materials, Inc. - Inventors: Wolfgang BUSCHBECK; Juergen HENRICH; Andreas LOPP; Susanne SCHLAEFER - Web page: https://patentgrep.com/patent/US20130199891A1 ## CPC - H10P 72/33: {into and out of processing chamber} - H10P 72/0466: {characterised by the construction of the load-lock chamber} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A dynamic load lock chamber that includes a plurality of actuators positioned along its length to achieve a desired pressure gradient from an atmospheric pressure side to a processing pressure side of the chamber is provided. The chamber includes a transport belt continuously running through the chamber to transport substrates from the atmospheric pressure side to the processing pressure side of the chamber, if situated on an inlet side of a production line, and from the processing pressure side to the atmospheric pressure side of the chamber, if positioned on an outlet side of the production line. Separation mechanisms may be attached to the belt to separate discrete regions within the chamber into a plurality of discrete volumes. Substrates may be disposed between the separation mechanisms, such that separation between adjacent pressure regions within the chamber is maintained as the substrates are transported through the chamber. ## Claims ### Claim 1 A load lock chamber, comprising: one or more walls defining a load lock region that extends between a first region that is at atmospheric pressure and a second region that is at a processing pressure; a linear conveying mechanism disposed within the load lock region and extending from the first region to the second region; a plurality of separation mechanisms coupled to the linear conveying mechanism and positioned to divide the load lock region into a plurality of discrete regions, wherein the linear conveying mechanism is configured to support and transfer one or more substrates disposed within the plurality of discrete regions; and one or more actuators in fluid communication with the load lock region and configured to reduce the pressure in each of the plurality of discrete regions. ### Claim 2 (depends on 1) The load lock chamber of claim 1, wherein the linear conveying mechanism comprises a continuous belt member. ### Claim 3 (depends on 1) The load lock chamber of claim 1, further comprising a first actuator configured to provide a pressure within a first discrete region of the plurality of discrete regions that is greater than the pressure in the first region. ### Claim 4 (depends on 3) The load lock chamber of claim 3, wherein the plurality of actuators comprises a second actuator configured to provide a pressure within a second discrete region of the plurality of discrete regions that is less than the pressure in the first discrete region and greater than the pressure in the second region. ### Claim 5 (depends on 4) The load lock chamber of claim 4, wherein the plurality of actuators comprises a third actuator configured to provide a pressure within a third discrete region of the plurality of discrete regions that is less than the pressure in the second discrete region and greater than the pressure in the second region. ### Claim 6 (depends on 1) The load lock chamber of claim 1, wherein each separation mechanism comprises a spring-loaded vane. ### Claim 7 (depends on 6) The load lock chamber of claim 6, wherein each separation mechanism further comprises a spring-loaded end member. ### Claim 8 (depends on 1) The load lock chamber of claim 1, wherein each separation mechanism comprises two separation members extending across a width of the linear conveying mechanism. ### Claim 9 (depends on 1) The load lock chamber of claim 1, wherein each separation mechanism comprises a pocket for disposing one or more substrates therein. ### Claim 10 A method for transferring substrates from atmospheric pressure to a processing pressure, comprising: transferring one or more substrates from atmospheric pressure to a first pressure region within a load lock chamber; transferring the one or more substrates from the first pressure region to a second pressure region within the load lock chamber using a linear conveying mechanism, wherein the second pressure region has a pressure that is less than the first pressure region; transferring the one or more substrates from the second pressure region into a third pressure region within the load lock chamber using the linear conveying mechanism, wherein the third pressure region has a pressure that is less than the second pressure region; and transferring the one or more substrates into a processing pressure region using the linear conveying mechanism, wherein the processing pressure region has a pressure that is less than the third pressure region. ### Claim 11 (depends on 10) The method of claim 10, wherein the first pressure region has a pressure that is greater than atmospheric pressure. ### Claim 12 (depends on 10) The method of claim 10, further comprising transferring the substrate from the third pressure region into a fourth pressure region of the load lock chamber using the linear conveying mechanism, wherein the fourth pressure region has a pressure that is less than the third pressure region and greater than the processing pressure region. ### Claim 13 (depends on 10) The method of claim 10, wherein the linear conveying mechanism comprises a continuous belt member. ### Claim 14 A substrate processing system, comprising: a first load lock chamber comprising a first linear conveying mechanism configured to transfer substrates therethrough and having a plurality of first actuators fluidly coupled to a plurality of discrete regions within a load lock region of the first load lock chamber, wherein the plurality of first actuators are configured to apply a pressure gradient from an atmospheric pressure side of the first load lock chamber to a processing pressure side of the first load lock chamber; one or more processing chambers coupled to the first load lock chamber; and a second load lock chamber coupled to the one or more processing chambers, wherein the second load lock chamber comprises a second linear conveying mechanism configured to transfer substrates therethrough and having a plurality of actuators fluidly coupled to a plurality of discrete regions within a load lock region of the second load lock chamber, wherein the plurality of second actuators are configured to apply a pressure gradient from a processing pressure side of the second load lock chamber to an atmospheric pressure side of the second load lock chamber. ### Claim 15 (depends on 14) The substrate processing system of claim 14, wherein each of the first and second linear conveying mechanisms comprise a continuous belt member having a plurality of separation mechanisms attached thereto. ### Claim 16 (depends on 15) The substrate processing system of claim 15, wherein each separation mechanism comprises a spring-loaded vane. ### Claim 17 (depends on 16) The substrate processing system of claim 16, wherein each separation mechanism further comprises spring loaded end members. ### Claim 18 (depends on 15) The substrate processing system of claim 15, wherein each separation mechanism comprises dual separation member extending across a width of the linear conveying mechanism. ### Claim 19 (depends on 15) The substrate processing system of claim 15, wherein each separation mechanism comprises a pocket for disposing one or more substrates therein. ### Claim 20 A method for transferring substrates from atmospheric pressure to a processing pressure, comprising: disposing one or more substrates on a supporting surface of a linear conveying mechanism, wherein the one or more substrates and the supporting surface are disposed between two separation mechanisms that are coupled to a portion of the linear conveying mechanism; transferring the one or more substrates, the supporting surface and the two separation mechanisms through a load lock region that is defined by one or more walls of a load lock chamber, wherein the load lock region extends between a first region that is at atmospheric pressure and a second region that is at a processing pressure; and removing an amount of a gas from a volume defined between the supporting surface, the two separation mechanisms and at least a portion of the one or more walls as the one or more substrates are transferred through the load lock region. ### Claim 21 (depends on 20) The method of claim 20, wherein the removing the amount of the gas from the volume, further comprises: receiving a portion of the gas disposed in the volume in a first pocket formed in the one or more walls of the load lock chamber when the linear conveying mechanism positions the volume so that it is in direct fluid communication with the first pocket. ### Claim 22 (depends on 21) The method of claim 21, further comprising: receiving a portion of the gas disposed in the volume in second pocket formed in the one or more walls of the load lock chamber when the linear conveying mechanism positions the volume so that it is in direct fluid communication with the second pocket. ### Claim 23 (depends on 20) The method of claim 20, wherein the second region is at a pressure that is less than the pressure in the first region. ### Claim 24 (depends on 20) The method of claim 20, wherein the linear conveying mechanism comprises a continuous belt member.