# US 2013/0199719 A1 · Drawing apparatus, and method of manufacturing article

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- Number: US 2013/0199719 A1
- Document ID: US20130199719A1
- Status: Published application
- Kind: A1
- Application number: 13/754,216
- Filed: 2013-01-30
- Published: 2013-08-08
- Earliest claimed: 2012-02-06
- Assignees: Canon Kabushiki Kaisha
- Inventors: Go TSUCHIYA; Tomoyuki MORITA
- Web page: https://patentgrep.com/patent/US20130199719A1

## CPC

- H01J 37/3007: {Electron or ion-optical systems}
- B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
- B82Y 40/00: Manufacture or treatment of nanostructures
- H01J 37/1474: {Scanning means}
- H01J 37/302: Controlling tubes by external information, e.g. program control (H01J37/304 takes precedence)
- H01J 37/3177: {Multi-beam, e.g. fly's eye, comb probe}
- H01J 2237/043: Beam blanking
- H01J 2237/30488: Raster scan
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams includes: a blanking device configured to individually blank the plurality of charged particle beams; a scanning deflector configured to deflect the plurality of charged particle beams to scan the plurality of charged particle beams on the substrate; and a controller configured to generate a periodic signal to control a periodic deflection operation of the plurality of charged particle beams by the scanning deflector. The controller is configured to adjust an amount of deflection of the plurality of charged particle beams by the scanning deflector in a period of the periodic signal so that a scanning speed of the plurality of charged particle beams becomes a target speed.

## Claims

### Claim 1

A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams, the apparatus comprising:
a blanking device configured to individually blank the plurality of charged particle beams;
a scanning deflector configured to deflect the plurality of charged particle beams to scan the plurality of charged particle beams on the substrate; and
a controller configured to generate a periodic signal to control a periodic deflection operation of the plurality of charged particle beams by the scanning deflector,
wherein the controller is configured to adjust an amount of deflection of the plurality of charged particle beams by the scanning deflector in a period of the periodic signal so that a scanning speed of the plurality of charged particle beams becomes a target speed.

### Claim 2 (depends on 1)

The apparatus according to claim 1, wherein the controller is configured to determine the target speed based on at least one of a sensitivity of a resist included in the substrate, a current density of the plurality of charged particle beams, and a pixel density of drawing data.

### Claim 3 (depends on 1)

The apparatus according to claim 1, wherein the controller is configured to determine the target speed based on a current density of a charged particle beam having a minimum current density among the plurality of charged particle beams.

### Claim 4

A method of manufacturing an article, the method comprising:
performing drawing on a substrate using a drawing apparatus;
developing the substrate on which the drawing has been performed; and
processing the developed substrate to manufacture the article,
wherein the drawing apparatus performs the drawing on the substrate with a plurality of charged particle beams, the apparatus including:
a blanking device configured to individually blank the plurality of charged particle beams;
a scanning deflector configured to deflect the plurality of charged particle beams to scan the plurality of charged particle beams on the substrate; and
a controller configured to generate a periodic signal to control a periodic deflection operation of the plurality of charged particle beams by the scanning deflector,
wherein the controller is configured to adjust an amount of deflection of the plurality of charged particle beams by the scanning deflector in a period of the periodic signal so that a scanning speed of the plurality of charged particle beams becomes a target speed.