Vapor deposition device, vapor deposition method, and method for producing organic electroluminescence display device

A vapor deposition device for forming, on a film formation substrate on which the film is to be formed, a film having a predetermined pattern, the film formation substrate having a partition wall that has a predetermined height and that stands between film formation regions on the film formation substrate,

• the vapor deposition device comprising:
• a mask unit provided so as to face the film formation substrate and so as to include:
• a vapor deposition mask that has an opening and that is smaller in area than a vapor deposition region of the film formation substrate, wherein the vapor deposition mask includes an engaging section for engaging with the partition wall;
• and
• a vapor deposition source that has an emission hole for emitting a vapor deposition particle, the emission hole being provided so as to face the vapor deposition mask,
• the vapor deposition mask and the vapor deposition source being fixed in position relative to each other;
• contacting means for bringing the film formation substrate and the vapor deposition mask into contact with each other at the partition wall;
• and
• moving means for moving at least a first one of the mask unit and the film formation substrate relative to a second one thereof in a state in which the vapor deposition mask and the film formation substrate are in contact with each other at the partition wall.