Apparatus for flexible substrate position control
AssigneeFuji Electric Co., Ltd.
InventorsTakenori Wada, Takashi Yoshida, Shoji Yokoyama, Takanori Yamada, Masanori Nishizawa
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AssigneeFuji Electric Co., Ltd.
InventorsTakenori Wada, Takashi Yoshida, Shoji Yokoyama, Takanori Yamada, Masanori Nishizawa
Estimating the term…
An apparatus (30) for control of the position of a flexible substrate (1) in the vertical width direction has first and second upper sandwiching roller pairs (31, 32) for sandwiching the upper edge of the flexible substrate while sending the flexible substrate. Rotation shafts of the first upper sandwiching rollers (31) are inclined so as to have a deflection angle (α) directed obliquely upward with respect to a first transport direction (F), in a sandwiching portion, of the flexible substrate, and rotation shafts of the second upper sandwiching rollers (32) are inclined so as to have a deflection angle (α) directed obliquely upward with respect to a second transport direction (R) opposite the first transport direction in a sandwiching portion. A switching device for switching the first and second upper sandwiching roller pairs (31, 32) between operative and inoperative states is provided.
An apparatus for position control of a flexible substrate in a vertical direction in a processing apparatus transporting a strip-shaped flexible substrate in a vertical orientation toward a horizontal direction and processing the substrate on a transport path, said apparatus comprising:
An apparatus for position control of a flexible substrate in a width direction in a processing apparatus transporting a strip-shaped flexible substrate and processing the substrate on a transport path, said apparatus comprising:
Dependencies are inferred from the claim text.