Monocrystalline semiconductor materials
AssigneeSchmid Silicon Technology GmbH
InventorsUwe Kerat, Christian Schmid, Jochem Hahn
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Abstract
A method of producing a monocrystalline semiconductor material includes providing a starting material composed of the semiconductor material, transferring the starting material into a heating zone in which a melt composed of the semiconductor material is fed with the starting material, and lowering the melt from the heating zone and/or raising the heating zone such that, at a lower end portion of the melt, a solidification front forms along which the semiconductor material crystallizes in a desired structure, wherein the starting material composed of the semiconductor material is provided in liquid form and fed into the melt in liquid form.
Claims15
A method of producing a monocrystalline semiconductor material comprising:
- providing a starting material composed of the semiconductor material,
- transferring the starting material into a heating zone in which a melt composed of the semiconductor material is fed with the starting material, and
- lowering the melt from the heating zone and/or raising the heating zone such that, at a lower end portion of the melt, a solidification front forms along which the semiconductor material crystallizes in a desired structure,
- wherein the starting material composed of the semiconductor material is provided in liquid form and fed into the melt in liquid form.
An installation that produces a monocrystalline semiconductor material comprising:
- a source of a liquid semiconductor material serving as starting material,
- heating media that produce and/or maintain a melt composed of the semiconductor material, and
- media for the controlled feeding of the liquid semiconductor material serving as starting material into the melt.
Dependencies are inferred from the claim text.