US 2013/0199275 A1Published application

Leak Detector

AssigneeUlvac, Inc.

InventorsYoshikazu Matsumoto, Norimasa Seto, Daisuke Nakamura, Akihiro Maeda

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Abstract

Provided is a convenient leak detector which has high detection sensitivity and can quickly start a leak test after the start of vacuuming a test piece, without impairing the capabilities such as fast response to helium gas. The leak detector includes a mass spectrometer tube configured to detect a search gas and a turbo-molecule pump which has a plurality of stages rotors and stators alternately arranged in a housing, the rotors attached to a rotary shaft, and includes a drive source configured to rotationally drive the rotary shaft. An intake port communicating with a test piece TP and a connection port to which the mass spectrometer tube is connected are opened at positions away from each other in a wall surface of the housing, the wall surface facing a rotor of the uppermost stage.

Claims2

Dependent claims

A leak detector including:

a mass spectrometer tube configured to detect a search gas;
and
a turbo-molecule pump which has a plurality of stages of rotors and stators alternately arranged inside a housing, the rotors being attached to a rotary shaft,
and which includes a drive source configured to rotationally drive the rotary shaft;
an intake port of the turbo-molecule pump being connected to a test piece through a connection pipe, the leak detector configured to perform leak detection by causing the search gas to enter the mass spectrometer tube from inside of the test piece, wherein
the intake port communicating with the test piece and a connection port to which the mass spectrometer tube is connected are opened at positions away from each other in a wall surface of the housing, the wall surface facing one of the rotors which is located at a highest vacuum side.

3 more elements

Dependencies are inferred from the claim text.