Analysis of molecular contamination in vacuum environments

Abstract

A pre-concentration device is provided for a gas analysis system (10) for collecting molecular contamination in a vacuum environment (11). The pre-concentration device (13) comprises a hollow element (15) having an entrance opening (20) for receiving molecules from the vacuum environment (11) in a collection phase, a gas outlet for transferring collected molecules to a vacuum compatible detector or second preconcentration device in a transfer phase. The device has an inner wall for adsorbing molecules in the collection phase and desorbing molecules in the transfer phase. The device has a filler element (14) that is movable from a first position outside the hollow element in the collection phase to a second position inside the hollow element in the transfer phase which second position leaves open a transfer channel to the gas outlet along the inner wall. Advantageously, the device enables transferring of the organic or inorganic contaminants collected in the device under vacuum conditions, and requires a minimal amount of ultra pure gas for the transport of the contaminants to a detector or further a concentration device, which lowers the lower limit of detection.

Dependencies are inferred from the claim text.