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US 2013/0199210 A1Published application
Cryopump
AssigneeSumitomo Heavy Industries, Ltd.
InventorKen Oikawa
Life of this patent
Estimating the term…
Abstract
A cryopump includes a low-temperature cryopanel, a high-temperature cryopanel provided outside the low-temperature cryopanel, and a housing provided outside the high-temperature cryopanel. The high-temperature cryopanel includes an extension panel extending outward. The housing includes an inlet flange surrounding the extension panel.
Claims8
A cryopump comprising:
- a housing comprising a tubular portion extending in an axial direction toward an inlet of the cryopump;
- a flange comprising an inner periphery portion and an outer periphery portion, the inner periphery portion being provided on an outer side, in a radial direction, of an opening end of the tubular portion, the outer periphery portion being configured to attach the cryopump;
- and
- an inlet cryopanel positioned at the inlet,
- wherein the inlet cryopanel comprises an extended portion outside the tubular portion in the radial direction,
- wherein the inner periphery portion and the outer periphery portion form a height difference therebetween in the axial direction,
- wherein the inlet cryopanel is surrounded by the flange with a clearance in the axial direction formed between the extended portion and the inner periphery portion and with a clearance in the radial direction formed between the extended portion and the outer periphery portion.
4 more elements
A cryopump comprising:
- a low-temperature cryopanel;
- a high-temperature cryopanel provided outside the low-temperature cryopanel;
- and
- a housing provided outside the high-temperature cryopanel,
- wherein the high-temperature cryopanel comprises an extended portion extending outward, and the housing comprises a stepped flange surrounding the extended portion.
2 more elements
A cryopump comprising:
- a housing comprising a tubular portion extending in an axial direction toward an inlet of the cryopump;
- an inlet cryopanel positioned at the inlet;
- and
- a shield panel that extends in the axial direction inside the tubular portion, a gap in the axial direction formed between the shield panel and the inlet cryopanel,
- wherein the inlet cryopanel comprises a skirt for covering the gap.
2 more elements
A cryopump comprising:
- a low-temperature cryopanel;
- and
- a high-temperature cryopanel provided outside the low-temperature cryopanel,
- wherein the high-temperature cryopanel comprises an inlet cryopanel and a shield panel, a gap formed between the inlet cryopanel and an opening end of the shield panel,
- wherein the inlet cryopanel comprises a skirt for restricting a flow of gases through the gap.
2 more elements
Dependencies are inferred from the claim text.