Methods and Apparatuses of Using Metal Needle Arrays for Specimen Lift-Out and Circuit Edit
OwnerMehdi M. Yazdanpanah, Romaneh Jalilianinventors
Life of this patent
Estimating the term…
Loading patent…
OwnerMehdi M. Yazdanpanah, Romaneh Jalilianinventors
Estimating the term…
Embodiments of the present invention provide method and apparatus of restoring probes attached to the manipulator in a control environment (e.g. vacuum chamber of an focus ion beam) without a need to open the vacuum chamber. Another embodiment of the present invention teaches construction and application of various shapes of nanoforks from a nanoneedles array inside a FIB vacuum chamber. In another embodiment, the present invention teaches edition and correction of completed and oxide-coated circuit boards by re-nano-wiring using nanoneedles of a nanoneedles array (as nanowire supply), contained in the same controlled space. In this embodiment, individual nanoneedles in a nanoneedle array are manipulated by a manipulator and placed in such a way to make electrical contact between the desired points.
A method of micromanipulation of a first specimen attached to a first base structure in a controlled space using a restorable tip on a microprobe, said method comprising,
An apparatus for manipulating specimen, said apparatus comprising:
A method of editing a circuit protected by an insulation material using a nanoneedle array, said method comprising:
Dependencies are inferred from the claim text.