Workpiece positioning method and apparatus
AssigneeMbda UK Limited
InventorsAndrew Michael Chugg, Jonathan James Ward, James Robert Mcintosh
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Abstract
A method of relatively positioning a workpiece and a reference axis comprising effecting relative displacements of the workpiece and the reference axis along orthogonal axes so that an intersection of the reference axis with the workpiece is moved at substantially constant speed along a curvilinear path. The method is particularly applicable to SEE sensitivity mapping of a microchip memory using a pulsed laser, relative to the axis of which the chip is moved in a spiral path.
Claims16
A method of relatively positioning a workpiece and a reference axis comprising effecting relative displacements of the workpiece and the reference axis along orthogonal axes so that an intersection of the reference axis with the workpiece is moved at substantially constant speed along a curvilinear path.
Apparatus for relatively positioning a workpiece and a reference axis comprising x-wise displacement means and y-wise displacement means for effecting relative displacements of the workpiece and the reference axis along orthogonal axes and control means configured to operate the displacement means so that in operation an intersection of the reference axis with the workpiece is moved at constant speed along a curvilinear path.
(canceled)
Dependencies are inferred from the claim text.