Reactive-species supply device and surface treatment apparatus
AssigneesNational University Corporation Nagoya University, Fuji Machine Mfg. Co., Ltd.
InventorsMasaru Hori, Hiroyuki Kano, Tetsunori Kawasumi, Naofumi Yoshida, Akihiro Kawajiri, Toshimitsu Watanabe, Joji Isozumi
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Abstract
A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.
Claims11
A reactive-species supply device configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object, said reactive-species supply device comprising:
- at least one pair of electrodes configured to form said electric discharge space;
- and
- an electrode protection device configured to protect said electrodes from the treatment gas.
Dependencies are inferred from the claim text.